On the Static Pull-In of Tilting Actuation in Electromagnetically Levitating Hybrid Micro-Actuator: Theory and Experiment

This work presents the results of experimental and theoretical study static pull-in tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on combination inductive electrostatic actuation. A semi-analytical model to such phenomenon is developed, for first time, as result using qualitative technique Lagrangian approach analyze contactless suspensions recent progress in calculation mutual inductance force between two circular filaments. The obtained non-linear model, accounting degrees freedom actuator, allows us predict accurately displacement voltage. modeling were verified experimentally agree well with measurements.